INEXMAT

适用产品	可适用主要材料		可适用其他涂层
真空吸盘	Sintered SiC (SiC or S-SiC)		CVD of DLC CVD of Ti/TiN Sputtering of various metals Teflon
	Reaction Bonded SiC (Si-SiC)	(选项 : 50% SiC, 75% SiC, 90% SiC)
	Bulk Al2O3	(选项 : White, Black)
	Si3N4
	Porous Ceramics	(选项：孔隙率、孔径尺寸及多种表面电阻)
	Others	Bulk CVD SiC Quartz / Zerodur Al-SiC MMC (选项 : 30% SiC, 70% SiC) ZrO2 Al2O3 Coating (APS) (选项 : White, Black)
ESC	Al2O3 Plate	Coulomb type (Black) JR type (White)
	Al2O3 Coating (APS)	Coulomb type (Black) JR type (White)
	AlN Plate	JR type
	Polymer Ceramics Coating	JR type
GDP	Bulk CVD SiC	(选项 : High resistivity, Low resistivity)
GDP	Bulk Y2O3
陶瓷加热器	AlN Plate

Properties		Unit	SiC	Si-SiC 50%	Si-SiC 70%	Black Al2O3	Si3N4	Al2O3 99.5%
Main component purity		wt%	98	SiC 50% Si 30%	SiC 70% Si 30%	92	90	99.5%
Color		-	Black	Dark Grey	Dark Grey	Black	Gray	Ivory
Density		g/㎤	3.15	2.8	3.0	4.05	3.16	3.9
Water Absorption		%	0	0	0	0	0	0
Bending strength		MPa	490	300	400	324	750	360
Young’s modulus		GPa	450	280	410	340	285	370
Vickers Hardness		GPa	25	20	21	14	16	16
Coefficient of Thermal Expansion(RT)		1/K (×10⁻⁶)	3.9	4.0	3.8	8.65	2.7	7.7
Thermal Conductivity		W/m·K	155	175	192	-	23	32
Thermal Shock Resistance		∆T (K)	>300	>300	>300	-	700	250
Volume Resistivity	25℃	Ω • cm	10⁵	10^-2	10^-2	10⁸	10¹⁴	10¹⁵
Reflectance	wavelength 360nm	%	-	-	-	<7	-	-
主要材料选用理由			适合 ESD 的电阻高硬度（耐磨性）	相较 SiC较轻重量导电性	相较 SiC较轻重量导电性	适合 ESD的电阻反射率低可实现大面积加工	适用于高压、高温环境变形小	加工性能优良价格低廉
			适合光学设备的深色					适用于非光学设备场合