Photo Chuck
A photo chuck is a component used in the photolithography process, where circuit patterns are transferred onto wafers using light. It primarily holds the substrate in place by vacuum. In semiconductor equipment, a photo chuck is also commonly referred to as a wafer table.
The main materials used are S-SiC, Si-SiC, and black Al₂O₃. Our company provides services including repair of end-of-life photo chucks, manufacture of new spare parts, and modification of shape, structure, and patterns for equipment retrofitting or issue resolution. We also support the fabrication of large-area photo chucks for display applications.
Available Supply Types
|
Item |
Main Supply Types |
|
Process Application |
•Semiconductor photolithography
process
•Display photolithography process
|
|
Main Materials |
SiC, Si-SiC, Black Al2O3, Quartz, etc. |
|
Product Types |
•Pattern type, Pin type, Ring
type, Anti-warp type, etc.
|
Main Supply Levels
|
Level |
Description |
Manufacturing Process (Standard) |
|
L1 |
Flatness Repair |
Incoming inspection → Lapping/Polishing & in-process inspection → Final inspection → Cleaning + Packaging |
|
New |
All New |
SiC powder → Forming → (Green machining) → Sintering → Final machining → (Yellow lapping) → Patterning → Lapping/Polishing & in-process inspection → Final inspection → Cleaning + Assembly + Packaging |
Manufacturing Process
Product Image
