INEXMAT

Applicable Products	Compatible Base Materials		Available Additional Coatings
Vacuum chuck	Sintered SiC (SiC or S-SiC)		CVD of DLC CVD of Ti/TiN Sputtering of various metals Teflon
	Reaction Bonded SiC (Si-SiC)	(Options : 50% SiC, 75% SiC, 90% SiC)
	Bulk Al2O3	(Options : White, Black)
	Si3N4
	Porous Ceramics	(Options: Various porosity levels, pore sizes, and surface resistivity available)
	Others	Bulk CVD SiC Quartz / Zerodur Al-SiC MMC (Options : 30% SiC, 70% SiC) ZrO2 Al2O3 Coating (APS) (Options : White, Black)
ESC	Al2O3 Plate	Coulomb type (Black) JR type (White)
	Al2O3 Coating (APS)	Coulomb type (Black) JR type (White)
	AlN Plate	JR type
	Polymer Ceramics Coating	JR type
GDP	Bulk CVD SiC	(Options : High resistivity, Low resistivity)
GDP	Bulk Y2O3
Ceramic Heater	AlN Plate

Properties		Unit	SiC	Si-SiC 50%	Si-SiC 70%	Black Al2O3	Si3N4	Al2O3 99.5%
Main component purity		wt%	98	SiC 50% Si 30%	SiC 70% Si 30%	92	90	99.5%
Color		-	Black	Dark Grey	Dark Grey	Black	Gray	Ivory
Density		g/㎤	3.15	2.8	3.0	4.05	3.16	3.9
Water Absorption		%	0	0	0	0	0	0
Bending strength		MPa	490	300	400	324	750	360
Young’s modulus		GPa	450	280	410	340	285	370
Vickers Hardness		GPa	25	20	21	14	16	16
Coefficient of Thermal Expansion(RT)		1/K (×10⁻⁶)	3.9	4.0	3.8	8.65	2.7	7.7
Thermal Conductivity		W/m·K	155	175	192	-	23	32
Thermal Shock Resistance		∆T (K)	>300	>300	>300	-	700	250
Volume Resistivity	25℃	Ω • cm	10⁵	10^-2	10^-2	10⁸	10¹⁴	10¹⁵
Reflectance	wavelength 360nm	%	-	-	-	<7	-	-
Reasons for Selecting Main Materials			ESD-suitable resistivity and high hardness (wear resistance)	Lighter weight than SiC and electrically conductive	Lighter weight than SiC and electrically conductive	ESD-suitable resistivity, low reflectivity, large-area applicable	Low deformation under high pressure and high temperature	Ease of machining Cost-effective
			Dark color suitable for optical equipment					For non-optical equipment applications